MBE

Stand-alone MBE System with fast-intro chamber

• Base pressure better than 2x10-10 mbar
• 4-axes manipulator with direct and e-beam heating up to 1200 °C and LN2 cooling
• Load lock with linear transfer for fast and easy flag style sample holders introduction??. Able to store up to 6 holders.
• Process chamber contains ports for e.g. RHEED gun, ion gun, beam flux monitor, quartz balances etc.
• Replaceable bottom flange, with a dedicated lifting trolley
• Cross-contamination barriers in the processing chamber

The process chamber is equipped with additional ports for e.g. analysis instruments.