MDA-80FA

Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Motorized joystick control , Motorized zoom microscope and stage , Microscope position control system

Spec

• Type: Full automatic
• Mask size: up to 9 inch
• Substrate size: 8 ~ 12 inch
• Uniform beam size:10.25 * 10.25 inch
• UV light source:UV Lamp, 2 kW
• Beam wavelength:350 ~ 450 nm
• Beam uniformity:<±5 %
• 365 nm intensity: ~ 25 mW/?
• Alignment method: Full automatic
• Alignment accuracy: 1 um
• Process mode: Soft, Hard, Vacuum contact & Proximity
• Process resolution: 1 um @ 1 um PR thickness with vacuum contact