Plasma Technology

PLASMA FOR DEPOSITION

Product description: plasma for deposition
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Atmopherc plasma for nano-coating and deposition
Coating/deposition under atmospheric pressure

Features
Atmospheric plasma with the quality of vacuum plasma
– In-line process
– fast coating ( ~ 100mm/s)
– highly even coating results
– thickness of coating can be controlled

Application
Research, Development, Production of prototypes
– NANO / micro imprint lithography
– Ink Jet printing ( LCD, OLED, LED, Solar cell )
– MEMS
– Optic device
– Fuel cell / solar cell
– TFT
– Bio MEMS

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