MDA-12SA

Semi Auto Mask Aligner
Easy operation & Installation , Handling Substrates of Various sizes , PLC control with Touch screen panel

• Type：Joystick Control Semi-Auto
• Mask Size：Up to 14 inch
• Substrate size：8-12 inch circle
• Uniform beam size：13.25*13.25 inch
• UV light Source: UV Lamp,2KW,5KW
• Beam wave length：350 ~ 450 nm
• Beam Uniformity ：<±5 %
• 365 nm intensity:2KW~ 25 mW/?;5KW~ 45 mW/?
• Alignment method: Joystick Control Semi-Auto
• Alignment accuracy:1 um
• Process mode: Soft, Hard, Vacuum contact & Proximity
• Process resolution:2 um @ 1 um PR thickness with vacuum contact