MDA-20SA

Semi Auto Mask Aligner
Easy operation & Installation , Handling Substrates of Various sizes , PLC control with Touch screen panel

• Type： Joystick Control Semi-Auto
• Mask Size： User spec
• Substrate size： User spec
• Uniform beam size： User spec
• UV light Source: UV Lamp,5KW
• Beam wave length：350 ~ 450 nm
• Beam Uniformity ：<±7 %
• 365 nm intensity:5KW~ 45 mW/?
• Alignment method: Joystick Control Semi-Auto
• Alignment accuracy:1 um
• Process mode: Soft, Hard, Vacuum contact & Proximity
• Process resolution: Lens>3um,Mirror>9um