Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Motorized joystick control , Motorized zoom microscope and stage , Microscope position control system

Spec

• TypeJoystick control Semi-Auto
• Mask sizeup to 14 inch
• Substrate size8 ~ 12 inch
• Uniform beam size13.25 * 13.25 inch
• UV light sourceUV Lamp, 2 kW ,5 kW
• Beam wavelength350 ~ 450 nm
• Beam uniformity<±5 %
• 365 nm intensity2 kW : ~ 25 mW/? 5 kW : ~ 45 mW/?
• Alignment methodJoystick control Semi-Auto
• Alignment accuracy1 um
• Process modeSoft, Hard, Vacuum contact & Proximity
• Process resolution2 um @ 1 um PR thickness with vacuum contact
• Weight (kg)
• Dimensions (mm)