MDA-20FA

Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Motorized joystick control , Motorized zoom microscope and stage , Microscope position control system

Spec

• Type: Full automatic
• Mask size: User spec
• Substrate size: User spec
• Uniform beam size:User spec
• UV light source: UV Lamp, 2 kW,5KW
• Beam wavelength:350 ~ 450 nm
• Beam uniformity:<±5 %
• 365 nm intensity: 2KW~ 25 mW/?, 5KW~ 45 mW/?,
• Alignment method: Full automatic
• Alignment accuracy: 1 um
• Process mode: Soft, Hard, Vacuum contact & Proximity
• Process resolution:Lens>3um,Mirror>9um
• Weight：1500Kg
• Dimension:2600(W)*2300(D)*2400(H)