MDE-20SC

Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Motorized joystick control , Motorized zoom microscope and stage , Microscope position control system

Spec

• Type: Scan & Step Exposure
• Mask size: User spec
• Substrate size: User spec
• Uniform beam size:User spec
• UV light source: UV Lamp, 1 kW
• Beam wavelength:350 ~ 450 nm
• Beam uniformity:<±5 %
• 365 nm intensity: 2KW~ 25 mW/?, 5KW~ 45 mW/?,
• Alignment method: No alignment
• Alignment accuracy: No alignment
• Process mode: Soft, Hard, Vacuum contact
• Process resolution:2um@1um PR thickness with vacuum contact