SPIN-3000A

Spin coater is equipment for making a thin film on a substrate. It is equipment for dropping a solution to be coated on a substrate and evenly coating the entire surface through rotation.

Touch panel control , Programmable Recipe management , Easy operation , Adopt Drain , Exhaust hole in bowl , Dispenser

• Type ：Spin coater system
• Substrate size： 1 ~ 6inch
• Spin speed： 300 ~ 7,000 rpm(@without load) an error of less than 3 %
• Spin recipe：50steps, 50 recipes
• Chuck material： Anodized AL, Acetal
• Max Bowl size：12 inch
• Bowl material： Stainless steel
• Dispenser：No
• Weight :30kg
• Dimensions (mm)：390(W) * 570(D) * 280(H)