SPIN-4000A

Spin coater is equipment for making a thin film on a substrate. It is equipment for dropping a solution to be coated on a substrate and evenly coating the entire surface through rotation.

Touch panel control , Programmable Recipe management , Easy operation , Adopt Drain , Exhaust hole in bowl , Dispenser

• Type ：Spin coater system
• Substrate size： 6 ~ 12 inch
• Spin speed： 300 ~ 5,000 rpm(@without load) an error of less than 3 %
• Spin recipe：20steps, 20 recipes
• Chuck material： Anodized AL, Acetal
• Max Bowl size：18 inch
• Bowl material： Stainless steel
• Dispenser：No
• Weight :
• Dimensions (mm)：